Application of German E+H pressure and differential pressure transmitters in the semiconductor industry
With more and more artificial intelligence achievements entering people's vision, the development of the semiconductor industry has become a key battlefield for countries to compete in global technological competition. When the 2nm process became the finish line of the industry competition, the "precision war" in semiconductor cleanrooms had already begun - the number of particles in 1 cubic meter of air needs to be controlled in the single digits, and a pressure fluctuation of 0.1Pa could lead to the scrapping of the entire batch of wafers. Today, let's talk about how Endhaus Germany's E+H is researching the topic of "pressure monitoring" to help safeguard the precision goals of semiconductor wafer fabs. In semiconductor wafer fabs, the single project usage of pressure transmitters can reach 3000-12000 units, covering all scenarios such as clean rooms, pure wastewater, gas transmission and distribution. 1. Clean room micro differential pressure: Ultra high precision builds a pollution defense line. Different areas of the clean room need to maintain a micro differential pressure gradient of 5-10Pa, which is the key to preventing cross contamination. The standard accuracy of the German E+H Delabar PMD75B differential pressure transmitter can reach 0.05% (platinum level accuracy 0.035%), and can be adjusted to -50~50Pa range through Bluetooth to achieve high-precision micro differential pressure monitoring, ensuring the cleanliness needs of the clean room. 2. Differential pressure of air ducts: Anti corrosion and dust protection ensure stable airflow in clean rooms. In HVAC systems, the pressure of exhaust ducts is often in the range of -3000~-1500 Pa, and the corrosiveness of acidic and alkaline exhaust gases is a huge challenge. The German E+H Deltabar PMD55B is equipped with alloy C276 diaphragm or PMC51B ceramic diaphragm sensor, which can easily prevent corrosion. It has successfully achieved stable data output of ± 10Pa and automatic alarm when exceeding 50Pa at a semiconductor exhaust site in Shanghai, completely solving the problem of uncontrolled fan flow rate. 3. Ultra pure water pipe pressure: Dry sensors eliminate the risk of leakage. Ultra pure water systems require "zero pollution" and non-metallic liquid contact. The German E+H Cerebra PMC5B adopts 99.9% high-purity ceramic membrane, with a dry oil-free design to prevent leakage from the source. Non metallic contact materials, especially PVDF (polyvinylidene fluoride), can be selected to meet the compatibility of chemicals in the semiconductor ultrapure water process. At the same time, ceramic membrane has self-monitoring function, which can quickly provide fault feedback for membrane damage and medium leakage, ensuring that the system does not shut down. 4. Differential pressure liquid level of wastewater tank: Corrosion resistant diaphragm sealing solution. Semiconductor industry wastewater often contains highly corrosive hydrogen fluoride, which poses a great challenge to the material of the docking liquid. The special coating sprayed on German E+H Cerebra PMP51B can effectively address corrosion issues. The application in a semiconductor fluorine-containing wastewater project in Zhejiang has successfully solved the pain point problem of membrane bulging or rupture of similar pressure transmitters in anti-corrosion environments. 5. Vacuum pressure: 0.1Pa absolute pressure limit suitable for core processes such as etching and thin film deposition, which need to be carried out in a high vacuum environment. The German E+H Cerebra PMC51B ceramic pressure transmitter adopts a capacitive measurement principle, is resistant to high vacuum, and can reach a minimum absolute pressure of 0.1Pa. It has the ability to provide accurate data support for 2nm processes.6. Gas/chemical transmission and distribution: EP polishing is suitable for high-purity gas with a requirement of over 99.999%. High purity specialty gases have strict sensor requirements. The German E+H Cerebrora PMP51B is matched with VCR connectors and EP polishing treatment to meet the pressure monitoring needs of high-purity gas transmission and distribution in specialty gas cabinets. The flexible special material diaphragm sealing system meets the stringent requirements of different corrosive chemicals and enables pressure monitoring of chemical storage tanks. From the birth of a chip to the upgrading of the entire semiconductor industry, the precision and reliability of pressure transmitters have always been the "invisible cornerstone" behind it. As we chase the stars and seas of chip technology, these silent "stress managers" are the important force guarding the course. From micro differential pressure control in cleanrooms to safety monitoring of exhaust gas treatment, from zero pollution guarantee of ultrapure water to precise delivery of specialty gases, German E+H pressure transmitters have always been at the forefront of semiconductor intelligent manufacturing, providing professional, safe, and efficient intelligent solutions for pressure measurement.
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